The Micro- and Nano fabrication facility at IOM comprises three separate areas in cleanroom ranging from ISO5 to ISO7.

A ISO7 cleanroom (Deposition Lab) hosts all the deposition tools: an e-gun evaporator (for up to 4" wafers), an home made thermal evaporator (up to 2") connected to a nitrogen glove box and capable to deposit both organic compounds and metals, and a thermal evaporator dedicated to low temperature materials (up to 3cm samples), all with in situ thickness control to sub-nanometer precision; a magnetron sputtering system with RF and DC sources (up to 4" wafers); two quartz furnaces for controlled wet and dry oxidation and thermal treatments up to 4"; and custom electrochemical baths for electroplating. A wet bench for sample cleaning and an optical microscope complement the offer.