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Gallery

array of pillars fabricated by EBL and ICP

suspended graphene strips on silicon

Suspended graphene strips

Suspended graphene strips on Si-Au microstructures

Micropillars based MEMS sensor

Nanosized pillar

Nanostructures produced starting from Block-copolymers self-assambly

Self assambly of block-copolymers and pattern transfer on Silicon

Hierarchical (micro - nano) structures

Tin deposition on self assambled structures

Star and dot

Metal cantilever array

Metal cantilver

3D asymmetric grating

3D asymmetric grating

MEMS

Aluminum grid made by EBL and E-gun evaporation

Aluminum grid made by EBL and E-gun evaporation

Aluminum grid made by EBL and E-gun evaporation

Aluminum grid made by EBL and E-gun evaporation

Sealed micro aperture of SiN by suspended graphene sheet

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