Metal evaporation

• Sistec e-gun evaporator
• Grazing angle evaporator

Magnetron sputtering

• Polaron SC7620
• Custom multitarget

Plasma enhanced chemical vapour deposition

• Sistec PECVD

Spin Coating

• Sawatec
• CT CPS20

Thermal oxidation

• Tubolar owens

Electroplating

• Custom electrochemical baths

SAM Functionalisation

• Vacuum process chamber