The Karl Suss manual MJB3 mask aligner has been for long time the work-horse of UV lithography fro reserch purposes.

MJB3 works with quartz or soda-lime optical mask - About 100 opticla masks with various common features are available for immediate use. Custom designed masks can be purchased from several company and proces range from few hundreds € to few tousands depending on the complexity and precision required.

MJB3 can accomodate wafers up to 3" and pieces of arbitrary size not exceeding 3"

MJB3 operates the I-line (365.4nm) of a low pressure Hg lamp. Feature with spatial resolution of 1 micron is routinely achieved.